| Titre : | Foundations of MEMS |
| Auteurs : | Chang Liu |
| Type de document : | texte imprimé |
| Editeur : | New Jersey : P.E.F, 2006 |
| Collection : | Illinois ECE Servies |
| ISBN/ISSN/EAN : | 978-0-13-147286-0 |
| Format : | 1 vol. (XXII-530 p.) / ill., couv. ill. / 24 cm |
| Langues originales: | |
| Index. décimale : | 621.3 (Électronique, électrotechnique...) |
| Catégories : | |
| Mots-clés: | Systèmes micro-électromécaniques |
| Résumé : |
For courses in micro-Electro-mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving micro fabrication technology ; all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking. |
| Côte titre : |
S8/71957-71959 |
Exemplaires (3)
| Cote | Support | Localisation | Disponibilité |
|---|---|---|---|
| S8/71957 | Livre | Bibliothèque centrale | Disponible |
| S8/71958 | Livre | Bibliothèque centrale | Disponible |
| S8/71959 | Livre | Bibliothèque centrale | Disponible |
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